喷涂氧化钛/氧化锆靶材 SprayTiOx/ZrOx Target
产品说明Productdescription
以等离子体为热源将相应粉末加热到熔融或半熔融状态并高速冲击背管表面形成致密涂层，从而制备出高纯度、高致密度TiOx，ZrOx靶材。
With plasma as the heat source, high purity high densityTiOx amd ZrOx targetsare produced from respectivepowders, whichare heatedto molten or semi-molten state anddeposited on the surface of backing tube at high speeds toform dense coatings.
氧化钛靶材TiOx target
项目 Item | 参数 Specifications | 检测手段 Testingmethod |
纯度 Purity | ≥99.9% | |
密度 Density | ≥4.0 g/cm3 | 阿基米德密度仪 Archimedesdensimeter |
杂质含量 Impurities | SiO2: ≤100ppm P2O5:≤10 ppm SO2:≤60 ppm Cu:≤18 ppm Fe:≤80 ppm 杂质总和 (Totalimpurity): ≤1000 ppm | 化学分析 Chemicalanalysis
|
电阻率 Electricalresistivity | ≤50 mΩ∙cm | 四探针电阻率仪 Fourprobe resistivity meter |
氧化锆靶材ZrOx target
项目 Item | 参数 Specifications | 检测手段 Testingmethod |
纯度 Purity | ≥99.9% | |
密度 Density | ≥5.4 g/cm3 | 阿基米德密度仪 Archimedesdensimeter |
杂质含量 Impuritycontent
| Al:≤100 ppm Cr:≤50 ppm Ti:≤100 ppm Fe:≤200 ppm 杂质总和 (Totalimpurity): ≤1000 ppm | ICP |
电阻率 Electricalresistivity | ≤0.5 Ω∙cm | 四探针电阻率仪 Four proberesistivity meter
背管材质 Backingtube -选用304/316L不锈钢（无磁）。 304/316L stainlesssteel (non-magnetic).
靶材尺寸Dimension -按照图纸要求加工 According tocustomized drawings. 应用领域Applications -光学玻璃AR膜系 ARfilms ofoptical glasses -LOW-E镀膜玻璃 LOW-Eglasses -工具镀膜和装饰镀膜 Tooland decorative coatings
|
