AZO靶材 AZO Target
产品说明Productdescription
AZO靶材是锌铝氧化物功能陶瓷材料，主要应用于磁控溅射制备AZO透明导电薄膜。采用粉末冶金，烧结工艺，多个靶管拼接贴合为AZO靶材成品。
AZOtarget is a functional zinc aluminum oxide ceramic material, whichis used for deposition of AZO transparent conductive thin filmswith magnetron sputtering. It is produced by suing power metallurgyand sintering process, in the form of tube/planar segments that arebonded into AZO target.
AZO旋转靶/平面靶 Rotary/ Planar AZOtarget
组分Chemical composition (wt%) | Al2O3:ZnO= 2:98 |
纯度 Purity (%) | ≥99.95 |
密度 Density (g/cm3) | ≥5.56 |
相对密度 Relative density (%) | ≥99.3 |
绑定贴合率 Adhering ratio (%) | ≥98% |
靶材尺寸 Dimension
-靶材外径(Target outerdiameter）∅151-160mm
-钢管直径(Stainless steel tube diameters) OD133 mm/ID 125 mm
-长度（Length）≤4 m
-按图纸要求加工(According tocustomized drawings)
应用领域Applications
-薄膜太阳能电池Thin film solarcells
-Low-E镀膜玻璃Low-E glasses
-汽车镀膜玻璃Automotive glasses
产品特点Product features
-密度高，成膜质量好。
High-density targetleading to high qualityfilms
-使用功率高，为13 kM/m。
Sputtering power ofas high as 13 kW/m.
-溅射速率、使用效率比同类产品高。
Sputtering rate andutilization efficiency that are high than the products ofcompetitors
